Construction and implementation of a 4-probe measuring system to determinate the temperature dependent sheet resistance of thin films
In order to build machines, electronic devices, it is necessary to know all properties of the materials. The machines and electronic devices use parts that are interconnected, the mechanical properties are important, but for some specific tasks the electrical properties are more important. In this...
| Autor Principal: | Pacheco Arenas, Carlos Arturo |
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| Formato: | Tesis de Maestría |
| Idioma: | Inglés |
| Publicado: |
Pontificia Universidad Católica del Perú
2017
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| Materias: | |
| Acceso en línea: |
http://tesis.pucp.edu.pe/repositorio/handle/123456789/8434 |
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| Sumario: |
In order to build machines, electronic devices, it is necessary to know all properties of the materials.
The machines and electronic devices use parts that are interconnected, the mechanical properties
are important, but for some specific tasks the electrical properties are more important. In this sense
it is necessary to predict the behavior of this parts in different temperatures to the environment.
The present thesis focus on implementation of a 4-probe measuring system to determinate the
sheet resistance of thin film samples showing the dependency of the resistivity on the film thickness
as well as on the deposition temperature. The method used to determine the resistivity is the
modified van der Pauw Method. Therefore, it is important the measurement of the current and the
voltage drop in the sample. It is also important to measure the distance between tips, in order to
calculate the resistivity. Furthermore, it is also important to find the correct transformation that
maps any four point of a plane to a new plane with four collinear points. The measurements are
controlled via LabVIEW and the measured data is displayed in the user interface. |
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