Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
To obtain spectra of a light emitting substrate during the deposition of Terbium (Tb) doped thin films by RF magnetron sputtering, an optomechanical device is developed, constructed and tested. The device is required to enable spatial scans of the substrate plane and the plasma beneath. Thereby,...
| Autor Principal: | Andreas Lich, Julian |
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| Formato: | Tesis de Maestría |
| Idioma: | Inglés |
| Publicado: |
Pontificia Universidad Católica del Perú
2017
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| Materias: | |
| Acceso en línea: |
http://tesis.pucp.edu.pe/repositorio/handle/123456789/9320 |
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| Sumario: |
To obtain spectra of a light emitting substrate during the deposition of Terbium
(Tb) doped thin films by RF magnetron sputtering, an optomechanical
device is developed, constructed and tested.
The device is required to enable spatial scans of the substrate plane and
the plasma beneath. Thereby, measurements of spatial emission intensity
distribution and a separation of the Tb spectrum from the plasma-overlain
substrate spectrum shall be possible.
After an introduction into theoretical and practical boundary conditions, the
system’s requirements are specified, followed by a brief investigation of existing
solutions for similar problems.
A basic optical prototype system is introduced and analysed. After a discussion
and evaluation of part solutions, an optomechanical system is developed,
constructed, analysed and compared to the prototype system. |
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