Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron

To obtain spectra of a light emitting substrate during the deposition of Terbium (Tb) doped thin films by RF magnetron sputtering, an optomechanical device is developed, constructed and tested. The device is required to enable spatial scans of the substrate plane and the plasma beneath. Thereby,...

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Autor Principal: Andreas Lich, Julian
Formato: Tesis de Maestría
Idioma: Inglés
Publicado: Pontificia Universidad Católica del Perú 2017
Materias:
Acceso en línea: http://tesis.pucp.edu.pe/repositorio/handle/123456789/9320
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